Granted Patent
Utility
US 6,579,374 · App. 09/769,562
Apparatus for fabrication of thin films
Inventors:
Niklas Bondestam, Janne Kesala, Leif Keto, Pekka Soininen
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Jan 25, 2001
Inventors
Niklas Bondestam
Janne Kesala
Leif Keto
Pekka Soininen
Assignee (at issue)
ASM Microchemistry Oy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.