IP Library › Granted Patent US 6,580,858
Granted Patent Utility
US 6,580,858 · App. 09/844,574

Micro-opto-electro-mechanical system (MOEMS)

Inventors: Jingkuang Chen, Joel A. Kubby, Decai Sun
Patented Case View Patent ↗
Granted: Jun 17, 2003 Filed: Apr 30, 2001
Inventors
Jingkuang Chen
Joel A. Kubby
Decai Sun
Assignee (at issue)
Xerox Corporation

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Quick Facts
Patent No.
US 6,580,858
App. No.
09/844,574
Filed
2001-04-30
Granted
2003-06-17
Kind
B2