Granted Patent
Utility
US 6,583,858 · App. 09/805,179
Substrate holder for lithographic apparatus
Inventors:
Frank Van Schaik, Gerardus Johannes Joseph Keijsers
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Mar 14, 2001
Inventors
Frank Van Schaik
Gerardus Johannes Joseph Keijsers
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.