Granted Patent
Utility
US 6,584,592 · App. 09/860,608
Semiconductor testing apparatus for testing semiconductor device including built in self test circuit
Inventors:
Ryuji Omura, Kazushi Sugiura, Mari Shibayama
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: May 21, 2001
Inventors
Ryuji Omura
Kazushi Sugiura
Mari Shibayama
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
Ryoden Semiconductor System
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.