IP Library › Granted Patent US 6,585,823
Granted Patent Utility
US 6,585,823 · App. 09/611,536

Atomic layer deposition

Inventor: Margreet Albertine Anne-Marie Van Wijck
Patented Case View Patent ↗
Granted: Jul 1, 2003 Filed: Jul 7, 2000
Inventor
Margreet Albertine Anne-Marie Van Wijck
Assignee (at issue)
ASM International N.V.

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,585,823
App. No.
09/611,536
Filed
2000-07-07
Granted
2003-07-01
Kind
B1