Granted Patent
Utility
US 6,586,318 · App. 09/473,576
Thin phosphorus nitride film as an N-type doping source used in laser doping technology
Inventors:
Jeng Ping Lu, Ping Mei, James B. Boyce
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Dec 28, 1999
Inventors
Jeng Ping Lu
Ping Mei
James B. Boyce
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.