Granted Patent
Utility
US 6,594,291 · App. 09/589,274
Ultra narrow band fluorine laser apparatus and fluorine exposure apparatus
Inventor:
Kiwamu Takehisa
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Jun 8, 2000
Inventor
Kiwamu Takehisa
Assignee (at issue)
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.