Granted Patent
Utility
US 6,600,138 · App. 09/836,098
Rapid thermal processing system for integrated circuits
Inventors:
Markus Hauf, Sing-Pin Tay, Yao Zhi Hu
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Apr 17, 2001
Inventors
Markus Hauf
Sing-Pin Tay
Yao Zhi Hu
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.