Granted Patent
Utility
US 6,600,162 · App. 09/600,477
Method and device for exposing a substrate to light
Inventors:
Peter Hahmann, Dirk Beyer, Dorothee Krauhs, Thomas Elster
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Sep 21, 2000
Inventors
Peter Hahmann
Dirk Beyer
Dorothee Krauhs
Thomas Elster
Assignee (at issue)
Leica Microsystems Lithography
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.