Granted Patent
Utility
US 6,601,594 · App. 09/837,722
Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece
Inventors:
Eric J. Bergman, Mignon P. Hess
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Apr 18, 2001
Inventors
Eric J. Bergman
Mignon P. Hess
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.