IP Library › Granted Patent US 6,602,110
Granted Patent Utility
US 6,602,110 · App. 09/894,477

Automated polishing apparatus and method of polishing

Inventors: Allen Y. Yi, Tomasz A. Pol, Michael Hezlep
Patented Case View Patent ↗
Granted: Aug 5, 2003 Filed: Jun 28, 2001
Inventors
Allen Y. Yi
Tomasz A. Pol
Michael Hezlep
Assignee (at issue)
3M INNOVATIVE PROPERTIES COMPANY

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Quick Facts
Patent No.
US 6,602,110
App. No.
09/894,477
Filed
2001-06-28
Granted
2003-08-05
Kind
B2