Granted Patent
Utility
US 6,605,198 · App. 08/564,659
Apparatus for, and method of, depositing a film on a substrate
Inventors:
Peter J. Clarke, Andrew Clarke
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Nov 29, 1995
Inventors
Peter J. Clarke
Andrew Clarke
Assignee (at issue)
Sputtered Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.