Granted Patent
Utility
US 6,609,950 · App. 09/897,918
Method for polishing a substrate
Inventors:
Norio Kimura, Yu Ishii, Hirokuni Hiyama, Katsuya Okumura, Hiroyuki Yano
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Jul 5, 2001
Inventors
Norio Kimura
Yu Ishii
Hirokuni Hiyama
Katsuya Okumura
Hiroyuki Yano
Assignees (at issue)
EBARA CORPORATION
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.