Granted Patent
Utility
US 6,610,169 · App. 09/840,349
Semiconductor processing system and method
Inventors:
Tue Nguyen, Tai Dung Nguyen, Craig Bercaw
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Apr 21, 2001
Inventors
Tue Nguyen
Tai Dung Nguyen
Craig Bercaw
Assignee (at issue)
Simplus Systems Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.