Granted Patent
Utility
US 6,610,449 · App. 10/224,064
Phase shift masking for “double-T” intersecting lines
Inventor:
Christophe Pierrat
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Aug 20, 2002
Inventor
Christophe Pierrat
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.