Granted Patent
Utility
US 6,610,564 · App. 09/910,794
Method of fabricating semiconductor device
Inventors:
Shinichi Fukada, Naotaka Hashimoto, Masanori Kojima, Hiroshi Momiji, Hiromi Abe, Masayuki Suzuki
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Jul 24, 2001
Inventors
Shinichi Fukada
Naotaka Hashimoto
Masanori Kojima
Hiroshi Momiji
Hiromi Abe
Masayuki Suzuki
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.