Granted Patent
Utility
US 6,613,240 · App. 09/727,881
Method and apparatus for smoothing thin conductive films by gas cluster ion beam
Inventors:
Wesley Skinner, Allen R. Kirkpatrick
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Dec 1, 2000
Inventors
Wesley Skinner
Allen R. Kirkpatrick
Assignee (at issue)
Epion Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.