Granted Patent
Utility
US 6,613,588 · App. 09/933,185
Floating particle inspection method and its apparatus and a semiconductor device processing apparatus
Inventors:
Hiroyuki Nakano, Toshihiko Nakata
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Aug 21, 2001
Inventors
Hiroyuki Nakano
Toshihiko Nakata
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.