Granted Patent
Utility
US 6,613,668 · App. 09/811,638
Two layer liner for dual damascene via
Inventors:
Petrus Maria Meijer, Cornelis Adrianus Henricus Antonius Mutsaers
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Mar 19, 2001
Inventors
Petrus Maria Meijer
Cornelis Adrianus Henricus Antonius Mutsaers
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.