Granted Patent
Utility
US 6,613,688 · App. 10/133,061
Semiconductor device and process for generating an etch pattern
Inventors:
Thomas Brown, Edward O. Travis, Jeffrey C. Haines
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Apr 26, 2002
Inventors
Thomas Brown
Edward O. Travis
Jeffrey C. Haines
Assignees (at issue)
Motorola, Inc.
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.