Granted Patent
Utility
US 6,614,027 · App. 09/708,488
Method of controlling electrostatic lens and ion implantation apparatus
Inventor:
Koji Iwasawa
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Nov 9, 2000
Inventor
Koji Iwasawa
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.