Granted Patent
Utility
US 6,614,050 · App. 09/696,272
Semiconductor manufacturing apparatus
Inventors:
Keizo Yamada, Tohoru Tsujide
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Oct 25, 2000
Inventors
Keizo Yamada
Tohoru Tsujide
Assignee (at issue)
Fab Solutions, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.