Granted Patent
Utility
US 6,616,717 · App. 09/859,147
Composition and method for polishing in metal CMP
Inventors:
Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack, Terence M. Thomas, Peter A. Burke, David Gettman, Sarah Lane
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: May 16, 2001
Inventors
Vikas Sachan
Elizabeth A. (Kegerise) Langlois
Qianqiu (Christine) Ye
Keith G. Pierce
Craig Lack
Terence M. Thomas
Peter A. Burke
David Gettman
Sarah Lane
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.