IP Library › Granted Patent US 6,616,870
Granted Patent Utility
US 6,616,870 · App. 09/633,210

Method of producing high aspect ratio domes by vapor deposition

Inventors: Jitendra S. Goela, Zlatko Salihbegovic
Patented Case View Patent ↗
Granted: Sep 9, 2003 Filed: Aug 7, 2000
Inventors
Jitendra S. Goela
Zlatko Salihbegovic
Assignee (at issue)
Shipley Company, L.L.C.

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Quick Facts
Patent No.
US 6,616,870
App. No.
09/633,210
Filed
2000-08-07
Granted
2003-09-09
Kind
B1