Granted Patent
Utility
US 6,617,218 · App. 10/192,552
Manufacturing method for semiconductor device
Inventor:
Hiroshi Kawashima
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Jul 11, 2002
Inventor
Hiroshi Kawashima
Assignee (at issue)
MITSUBISHI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.