Granted Patent
Utility
US 6,617,244 · App. 09/950,769
Etching method
Inventor:
Atsushi Nishizawa
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Sep 13, 2001
Inventor
Atsushi Nishizawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.