Granted Patent
Utility
US 6,618,403 · App. 09/811,354
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
Inventors:
Uwe Stamm, Hans-Stephan Albrecht, Guenter Nowinsk
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Mar 16, 2001
Inventors
Uwe Stamm
Hans-Stephan Albrecht
Guenter Nowinsk
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.