Granted Patent
Utility
US 6,620,215 · App. 10/023,827
Abrasive composition containing organic particles for chemical mechanical planarization
Inventors:
Yuzhuo Li, Guomin Bian, Kwok Tang, Joe Zunzi Zhao, John Westbrook, Yong Lin, Leina Chan
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Dec 21, 2001
Inventors
Yuzhuo Li
Guomin Bian
Kwok Tang
Joe Zunzi Zhao
John Westbrook
Yong Lin
Leina Chan
Assignee (at issue)
Dynea Canada Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.