Granted Patent
Utility
US 6,620,561 · App. 10/126,626
Method for designing photolithographic reticle layout, reticle, and photolithographic process
Inventors:
Amy A. Winder, Werner Juengling
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Apr 22, 2002
Inventors
Amy A. Winder
Werner Juengling
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.