Granted Patent
Utility
US 6,620,743 · App. 09/817,770
Stable, oxide-free silicon surface preparation
Inventors:
Robert H. Pagliaro, Jr., Mitchell L. Doty, Diane King
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Mar 26, 2001
Inventors
Robert H. Pagliaro, Jr.
Mitchell L. Doty
Diane King
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.