Granted Patent
Utility
US 6,621,582 · App. 09/750,996
Optical metrology system and method employing laser-server supplying laser energy to distributed slave metrology heads
Inventor:
R. Wolf
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Dec 29, 2000
Inventor
R. Wolf
Assignee (at issue)
Rudolph Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.