Granted Patent
Utility
US 6,621,846 · App. 09/501,160
Electric discharge laser with active wavelength chirp correction
Inventors:
Richard L. Sandstrom, Palash P. Das, George J. Everage, Frederick Erie, William N. Partlo, Igor V. Fomenkov
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Feb 9, 2000
Inventors
Richard L. Sandstrom
Palash P. Das
George J. Everage
Frederick Erie
William N. Partlo
Igor V. Fomenkov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.