Granted Patent
Utility
US 6,622,288 · App. 09/823,146
Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features
Inventors:
Yao-Ting Wang, Kent Richardson, Shao-Po Wu, Christophe Pierrat, Michael Sanie
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Mar 29, 2001
Inventors
Yao-Ting Wang
Kent Richardson
Shao-Po Wu
Christophe Pierrat
Michael Sanie
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.