Granted Patent
Utility
US 6,623,895 · App. 09/840,291
Hybrid phase-shift mask
Inventors:
Jang Fung Chen, Roger Caldwell, Thomas Laidig, Kurt E. Wampler
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Apr 24, 2001
Inventors
Jang Fung Chen
Roger Caldwell
Thomas Laidig
Kurt E. Wampler
Assignee (at issue)
ASML Masktools Netherlands B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.