Granted Patent
Utility
US 6,623,991 · App. 09/999,410
Method of measuring meso-scale structures on wafers
Inventors:
Kenneth C. Johnson, Fred E. Stanke
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Oct 31, 2001
Inventors
Kenneth C. Johnson
Fred E. Stanke
Assignee (at issue)
Therma-Wave, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.