Granted Patent
Utility
US 6,624,038 · App. 09/908,958
Capacitor electrode having uneven surface formed by using hemispherical grained silicon
Inventor:
Kazuki Arakawa
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Jul 19, 2001
Inventor
Kazuki Arakawa
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.