Granted Patent
Utility
US 6,624,071 · App. 09/820,758
Systems and method for fabrication of a thin film pattern
Inventor:
Shunichi Seki
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Mar 30, 2001
Inventor
Shunichi Seki
Assignee (at issue)
SEIKO EPSON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.