Granted Patent
Utility
US 6,624,726 · App. 09/944,568
High Q factor MEMS resonators
Inventors:
Feng Niu, Kenneth D. Cornett
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Aug 31, 2001
Inventors
Feng Niu
Kenneth D. Cornett
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.