Granted Patent
Utility
US 6,627,267 · App. 09/853,906
Plasma enhanced chemical deposition with low vapor pressure compounds
Inventor:
John D. Affinito
Patented Case
View Patent ↗
Granted: Sep 30, 2003
Filed: May 11, 2001
Inventor
John D. Affinito
Assignee (at issue)
Battelle Memorial Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.