Granted Patent
Utility
US 6,627,933 · App. 10/277,938
Method of forming minimally spaced word lines
Inventor:
Werner Juengling
Patented Case
View Patent ↗
Granted: Sep 30, 2003
Filed: Oct 23, 2002
Inventor
Werner Juengling
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.