IP Library › Granted Patent US 6,627,965
Granted Patent Utility
US 6,627,965 · App. 09/500,407

Micromechanical device with an epitaxial layer

Inventors: Harry L. Tuller, Richard Mlcak, Dharanipal Doppalapudi
Patented Case View Patent ↗
Granted: Sep 30, 2003 Filed: Feb 8, 2000
Inventors
Harry L. Tuller
Richard Mlcak
Dharanipal Doppalapudi
Assignee (at issue)
Boston MicroSystems, Inc.

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Quick Facts
Patent No.
US 6,627,965
App. No.
09/500,407
Filed
2000-02-08
Granted
2003-09-30
Kind
B1