Granted Patent
Utility
US 6,628,370 · App. 09/599,383
Illumination system with spatially controllable partial coherence compensating for line width variances in a photolithographic system
Inventors:
Andrew W. McCullough, Gregg M. Gallatin
Patented Case
View Patent ↗
Granted: Sep 30, 2003
Filed: Jun 22, 2000
Inventors
Andrew W. McCullough
Gregg M. Gallatin
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.