Granted Patent
Utility
US 6,628,682 · App. 09/716,411
Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus
Inventors:
Kiwamu Takehisa, Kouji Shio, Shinji Nagai, Yasuaki Iwata, Osamu Wakabayashi
Patented Case
View Patent ↗
Granted: Sep 30, 2003
Filed: Nov 21, 2000
Inventors
Kiwamu Takehisa
Kouji Shio
Shinji Nagai
Yasuaki Iwata
Osamu Wakabayashi
Assignee (at issue)
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.