Granted Patent
Utility
US 6,630,393 · App. 09/782,293
Semiconductor device manufacturing method and semiconductor device manufacturing by the same method
Inventor:
Ichiro Yamamoto
Patented Case
View Patent ↗
Granted: Oct 7, 2003
Filed: Feb 14, 2001
Inventor
Ichiro Yamamoto
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.