Granted Patent
Utility
US 6,632,127 · App. 10/091,105
Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same
Inventors:
Jerry W. Zimmer, Todd W. Buley, Albert Stubbmann
Patented Case
View Patent ↗
Granted: Oct 14, 2003
Filed: Mar 4, 2002
Inventors
Jerry W. Zimmer
Todd W. Buley
Albert Stubbmann
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.