Granted Patent
Utility
US 6,632,535 · App. 09/590,784
Method of forming antireflective coatings
Inventors:
Omar M. Buazza, Xiaodong Sun
Patented Case
View Patent ↗
Granted: Oct 14, 2003
Filed: Jun 8, 2000
Inventors
Omar M. Buazza
Xiaodong Sun
Assignee (at issue)
Q2100, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.