Granted Patent
Utility
US 6,632,691 · App. 10/120,734
Apparatus and method for determining doping concentration of a semiconductor wafer
Inventor:
William Howland
Patented Case
View Patent ↗
Granted: Oct 14, 2003
Filed: Apr 11, 2002
Inventor
William Howland
Assignee (at issue)
Solid State Measurements, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.