Granted Patent
Utility
US 6,632,750 · App. 09/905,887
Manufacturing method of semiconductor integrated circuit device
Inventors:
Hidenori Sato, Yoshiyuki Hayashi, Toshio Ando
Patented Case
View Patent ↗
Granted: Oct 14, 2003
Filed: Jul 17, 2001
Inventors
Hidenori Sato
Yoshiyuki Hayashi
Toshio Ando
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.