Granted Patent
Utility
US 6,633,379 · App. 09/877,531
Apparatus and method for measuring the degradation of a tool
Inventors:
Michael Roesner, Manfred Schneegans, David Wallis
Patented Case
View Patent ↗
Granted: Oct 14, 2003
Filed: Jun 8, 2001
Inventors
Michael Roesner
Manfred Schneegans
David Wallis
Assignees (at issue)
Semiconductor 300 GmbH & Co. KG
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.