Granted Patent
Utility
US 6,638,141 · App. 10/190,016
Method and apparatus for chemical-mechanical polishing
Inventor:
Shigeaki Ide
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: Jul 5, 2002
Inventor
Shigeaki Ide
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.